New laser excitation method for modal analysis of microstructure

作者：Xiong, Liangcai^*; Zhou, Quansheng; Wu, You; Chen, Peng

来源：Mechanical Systems and Signal Processing, 2015, 50-51: 227-234.

DOI：10.1016/j.ymssp.2014.05.012

• Laser impact excitation
• Modal analysis
• MEMS dynamics
• Cantilever beam
• Excitation method

A novel impulse laser excitation technique to determine the dynamic response of microelectro-mechanical systems (MEMS) has been investigated. During the laser excitation experiments, MEMS structures are excited by the wide-band impact force created by the laser-target interaction, and Laser Doppler Vibrometer (LDV) is introduced to measure the vibration velocity of MEMS structures. A distinguishing characteristic of the methodology is that both the excitation and measurement are non-contact, which is especially suitable for the testing of MEMS microstructures that are not easily accessible. This novel excitation method and MEMS modal analysis system are verified by experiments on various cantilever beams. The results show that the laser excitation is capable of exciting the first three modes of cantilevers.

• 出版日期2015-1
• 单位华中科技大学