A Terahertz Diagonal Multi-layer Horn Antenna Based on MEMS Technology

作者:Hou Wei*; Sun Zheng yang; Jiang Yi fan; Liu Yong; Lv Xin
来源:IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IEEE MTT-S IMWS-AMP 2015), 2015-07-01 to 2015-07-03.

摘要

A terahertz(THz) diagonal multi-layer horn antenna is proposed. The proposed antenna is composed of several silicon layers, monolithically fabricated by dry etching, and sputtering gold and gold-gold thermo-compression bonding. The input return loss shows a level below -8dB from 480 to 500GHz.The gaussicity of radiation patterns at the working band is calculated to be 92%. The proposed antenna exhibits asymmetric beamwidths of 13 in the E- and H-planes, and sidelobes below 15dB, along with a 22 dB gain. The proposed THz waveguide-fed proposed antenna is suitable for THz imaging and detection systems.