A micro dew point sensor with a thermal detection principle

作者：Kunze M^*; Merz J; Hummel W J; Glosch H; Messner S; Zengerle R

来源：Measurement Science and Technology, 2012, 23(1): 014004.

DOI：10.1088/0957-0233/23/1/014004

• dew point temperature
• hygrometer
• MEMS
• humidity sensor

We present a dew point temperature sensor with the thermal detection of condensed water on a thin membrane, fabricated by silicon micromachining. The membrane (600 x 600 x similar to 1 mu m(3)) is part of a silicon chip and contains a heating element as well as a thermopile for temperature measurement. By dynamically heating the membrane and simultaneously analyzing the transient increase of its temperature it is detected whether condensed water is on the membrane or not. To cool the membrane down, a peltier cooler is used and electronically controlled in a way that the temperature of the membrane is constantly held at a value where condensation of water begins. This temperature is measured and output as dew point temperature. The sensor system works in a wide range of dew point temperatures between 1 K and down to 44 K below air temperature. In experimental investigations it could be proven that the deviation of the measured dew point temperatures compared to reference values is below +/- 0.2 K in an air temperature range of 22 to 70 degrees C. At low dew point temperatures of -20 degrees C (air temperature = 22 degrees C) the deviation increases to nearly -1 K.

• 出版日期2012-1