A High-Speed Large-Range Tip-Tilt-Piston Micromirror Array

作者：Hopkins Jonathan B^*; Panas Robert M; Song Yuanping; White Carolyn D

来源：Journal of Microelectromechanical Systems, 2017, 26(1): 196-205.

DOI：10.1109/JMEMS.2016.2628723

• Micromirror array
• comb drive optimization
• flexure bearings
• beam steering
• FACT approach
• MEMS

This paper introduces the design of a high fill-factor (> 99%) micromirror array that consists of 1 mm(2) hexagonal mirrors, which are expected to each independently achieve continuous, closed-loop control of three degrees of freedom (DOFs)-tip, tilt, and piston-over large ranges (> +/- 10 degrees rotation and > +/- 30 mu m translation) at high speeds (similar to 45 kHz for a 1 degrees amplitude of rotational oscillation). The flexure topology of this array is designed using the freedom, actuation, and constraint topologies synthesis approach, which utilizes geometric shapes to help designers rapidly consider every flexure topology that best achieves a desired set of DOFs driven by decoupled actuators. The geometry of this array's comb-drive actuators is optimized in conjunction with the geometry of the system's flexures using a novel approach. The analytical models underlying this approach are verified using finite-element analysis and validated using experimental data. The capabilities of this new mirror array will enable, or significantly improve, the performance of a variety of high-impact optical technologies such as advanced optical switches, spatial-light modulators, displays, and laser steering or scanning devices.

• 出版日期2017-2