Lanthanide-Assisted Deposition of Strongly Electro-optic PZT Thin Films on Silicon: Toward Integrated Active Nanophotonic Devices

作者：George J P^*; Smet P F; Botterman J; Bliznuk V; Woestenborghs W; Van Thourhout D; Neyts K; Beeckman J

来源：ACS Applied Materials & Interfaces, 2015, 7(24): 13350-13359.

DOI：10.1021/acsami.5b01781

• chemical solution deposition
• electro-optic effect
• ellipsometry
• dielectric
• lead zirconate titanate
• modulator
• pockels coefficient

The electro-optical properties of lead zirconate titanate (PZT) thin films depend strongly on the quality and crystallographic orientation of the thin films. We demonstrate a novel method to grow highly textured PZT thin filing on silicon using the chemical solution deposition (CSD) process.: We report the use of ultrathin (5-15 nm) lanthanide (La, Pr, Nd, Sm) based intermediate layers for obtaining preferentially (100) oriented PZT thin films. X-ray diffraction measurements indicate preferentially oriented intermediate Ln(2)O(2)CO(3) layers providing an excellent lattice match with the PZT thin arts grown on top. The XRD and scanning electron microscopy measurements. reveal that the annealed layers are dense, uniform, crack-free and highly oriented (>99.8%) without apparent defects or secondary phases. The EDX and HRTEM characterization confirm that the template layers act as an efficient diffusion barrier and form A sharp interface between the substrate and the PZT. The electrical measurements indicate a dielectric constant of similar to 650, low dielectric loss of similar to 0.02, coercive field of 70 kV/cm, remnant polarization of 25 mu C/cm(2), and large breakdown electric field of 1000 kV/cm. Finally, the effective electro-optic coefficients of the films are estimated with a spectroscopic ellipsometer measurement, considering the electric field induced variations in the phase reflectance ratio. The electro-optic measurements reveal excellent linear effective pockels coefficients of 110 to 240 pm/V, which makes the CSD deposited PZT thin film an ideal candidate for Si-based active integrated nanophotonic devices.

• 出版日期2015-6-24