An analytical formulation for the modified Paschen's curve

作者：Tirumala Rakshit; Go David B^*

来源：Applied Physics Letters, 2010, 97(15): 151502.

DOI：10.1063/1.3497231

The modified Paschen's curve describes the gaseous breakdown potential (voltage) in microscale gaps, when deviations from the traditional Paschen's curve occur [F. Paschen, Ann. Phys. 273, 69 (1889)]. The deviation is due to ion-enhanced field emission that occurs in the high electric field of microgaps and acts as an additional cathode electron source. The present work derives an analytical formulation for the effect of ion-enhanced field emission and the modified Paschen's curve that uses a consistent, single breakdown criterion. The proposed model does not require the fitting factor required in prior models and constitutes a single analytical equation for microscale breakdown and the modified Paschen's curve.

• 出版日期2010-10-11