Adhesion Force Measurements of Nano-Imprint Materials Using Atomic Force Microscope

作者：Yun Hyeong Seuk; Lee Mongryong; Song Kigook^*

来源：Polymer-Korea, 2014, 38(3): 358-363.

DOI：10.7317/pk.2014.38.3.358

• atomic force microscope (AFM)
• adhesion force
• nano-pattern
• imprinting
• surface treatment

Adhesion forces between acrylate imprinting resin and a surface treated atomic force microscope (AFM) tip were investigated. Compared to the untreated silicon tip, 38% of the adhesion force is reduced for the hydrophobic tip treated with CH4 plasma whereas 1.6 time increases is found for the hydrophilic tip with 02 plasma treatment. Such a measurement of the adhesion force using AFM provides very quantitative results on adhesion comparing to the crosscut adhesion test which gives qualitative results. Since the adhesion area becomes larger as the imprinting pattern size gets smaller, the surface treatment issue becomes more important in the nano-imprinting process.

• 出版日期2014-5