Using Laser Interference Lithography in the Fabrication of a Simplified Micro and Nanofluidic Device for Label-free Detection

作者：Ajiri Taiga; Kasa Haruya; Maeki Masatoshi; Ishida Akihiko; Tani Hirofumi; Nishi Junji; Tokeshi Manabu^*

来源：Analytical Sciences, 2017, 33(10): 1197-1199.

DOI：10.2116/analsci.33.1197

• Label-free detection
• nanofluidic device
• diffraction grating
• laser interference lithography
• photolithography

Recently, we developed a label-free detection method based on optical diffraction, and implemented it in on our fabricated micro- and nanofluidic device. This detection method is simple and useful for detecting biomolecules, but the device fabrication consists of complicated processes. In this paper, we propose a simple method for fabricating the micro- and nanofluidic device; the fabrication combines laser interference lithography with conventional photolithography. The performance of a device fabricated by the proposed method is comparable to the performance of the device in our previous study.

• 出版日期2017-10