Lamination based embossing technique for LTCC

作者：Wilhelm Stefan P^*; Kay Robert W; Mohammed Mazher I; Lacrotte Yves; Desmulliez Marc P Y

来源：Microsystem Technologies, 2013, 19(6): 801-807.

DOI：10.1007/s00542-012-1702-y

This article describes a LTCC embossing technique performed during the isostatic lamination process. The technique allows for the reduction of manufacturing steps by patterning simultaneously the top and bottom faces of a green ceramic tape using structured metal sheets. The experiments detail the manufacture of raised and recessed patterns on the self constrained HL2000 ceramic system, including bump arrays, raised wall structures and recessed channels.

• 出版日期2013-6