Highly crystalline MoS2 thin films grown by pulsed laser deposition

作者：Serrao Claudy R^*; Diamond Anthony M; Hsu Shang Lin; You Long; Gadgil Sushant; Clarkson James; Carraro Carlo; Maboudian Roya; Hu Chenming; Salahuddin Sayeef

来源：Applied Physics Letters, 2015, 106(5): 052101.

DOI：10.1063/1.4907169

Highly crystalline thin films of MoS2 were prepared over large area by pulsed laser deposition down to a single monolayer on Al2O3 (0001), GaN (0001), and SiC-6H (0001) substrates. X-ray diffraction and selected area electron diffraction studies show that the films are quasi-epitaxial with good out-of-plane texture. In addition, the thin films were observed to be highly crystalline with rocking curve full width half maxima of 0.01 degrees, smooth with a RMS roughness of 0.27 nm, and uniform in thickness based on Raman spectroscopy. From transport measurements, the as-grown films were found to be p-type.

• 出版日期2015-2-2