Dependence of Decamethylcyclopentasiloxane (DMCPS) Dissociation on Ionized Energy by Using Quadrupole Mass Spectrum

作者：Zhang Haiyan^*; Ye Chao; Ning Zhaoyuan

来源：Plasma Science and Technology, 2010, 12(6): 677-680.

DOI：10.1088/1009-0630/12/6/08

• quadrupole mass spectrum
• dissociation
• ionized energy
• DMCPS organosilicon

Dependence of decamethylcyclopentasiloxane (DMCPS) organosilicon dissociation on ionized energy in the energy range of 25 eV to 70 eV is investigated by using a quadrupole mass spectrometry. At the ionized energy below 55 eV, the dissociation of DMCPS is dominant. As the ionized energy is above 55 eV, the DMCPS dissociation achieves the maximum cross section, while the fragments from the DMCPS dissociation can further dissociate, which leads to a different ingredient of fragments. At the lower ionized energy of 25 eV, the main fragments are SiOC(2)H(5)(+), SiCH(+), Si(+), O(2)(+) and CH(3)(+) ions, which shows an important effect on the SiCOH low-k film deposition.

• 出版日期2010-12
• 单位南京大学; 苏州大学