An infrared imaging method for high-throughput combinatorial investigation of hydrogenation-dehydrogenation and new phase formation of thin films

作者：Oguchi H^*; Hattrick Simpers J; Takeuchi I; Heilweil E J; Bendersky L A

来源：Review of Scientific Instruments, 2009, 80(7): 073707.

DOI：10.1063/1.3184024

• annealing
• hydrogenation
• infrared imaging
• magnesium compounds
• palladium
• thin films

We have developed an infrared imaging setup enabling in situ infrared images to be acquired, and expanded on capabilities of an infrared imaging as a high-throughput screening technique, determination of a critical thickness of a Pd capping layer which significantly blocks infrared emission from below, enhancement of sensitivity to hydrogenation and dehydrogenation by normalizing raw infrared intensity of a Mg thin film to an inert reference, rapid and systematic screening of hydrogenation and dehydrogenation properties of a Mg-Ni composition spread covered by a thickness gradient Pd capping layer, and detection of formation of a Mg(2)Si phase in a Mg thin film on a thermally oxidized Si substrate during annealing.

• 出版日期2009-7