Advances in silicon carbide science and technology at the micro- and nanoscales

作者：Maboudian Roya^*; Carraro Carlo; Senesky Debbie G; Roper Christopher S

来源：Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films , 2013, 31(5): 050805.

DOI：10.1116/1.4807902

Advances in silicon carbide microfabrication and growth process optimization for silicon carbide nanostructures are ushering in new opportunities for microdevices capable of operation in a variety of demanding applications, involving high temperature, radiation, or corrosive environment. This review focuses on the materials science and processing technologies for silicon carbide thin films and low dimensional structures, and details recent progress in manufacturing technology, including deposition, metallization, and fabrication of semiconductor microdevices, with emphasis on sensor technology. The challenges remaining in developing silicon carbide as a mainstay materials platform are discussed throughout.

• 出版日期2013-9