Fabrication and characterization of stretchable copper electrodes on poly(dimethylsiloxane) substrate by direct deposition

作者：Jeong Jonghyun; Jeong Jaewook

来源：Japanese Journal of Applied Physics, 2017, 56(11): 115801.

DOI：10.7567/JJAP.56.115801

Stretchable Cu electrodes are fabricated by direct deposition on He-and O-2-plasma-treated and prestretched poly( dimethylsiloxane) ( PDMS) substrates. The electrodes show conductivity owing to the formation of a hard and thin silica-like blocking layer, which forms low-period wavy structures on the PDMS substrate surface. The stretchable Cu electrode fabricated with He-plasma treatment shows superior performance compared with that fabricated with O-2-plasma treatment under a strain condition owing to the lack of -OH groups on the surface. In situ microscopy images obtained under strain conditions indicate that the good stretching capability of the stretchable Cu electrode originates from its low-frequency ( long-period) wavy structure. X-ray photoelectron spectroscopy measurements are performed to study the various impurities in the stretchable Cu electrode.

• 出版日期2017-11