Nonlinear dynamics study based on uncertainty analysis in electro-thermal excited MEMS resonant sensor

作者：Shi Huichao^*; Fan Shangchun; Zhang Yuwen; Sun Jinhao

来源：Sensors and Actuators A: Physical , 2015, 232: 103-114.

DOI：10.1016/j.sna.2015.05.016

• MEMS resonant sensor
• Double-clamped resonant beam
• Nonlinear vibration
• Uncertainty
• Sample-based stochastic model

Nonlinear vibration model of double-clamped resonant beam driven by electro-thermal excitation in a MEMS resonant pressure sensor is established. Inherent heat elevation of electro-thermal excitation is taken into account besides the nonlinear geometric effect. An approximate solution for this model is obtained via Galerkin procedure and multiple scales method. The sample-based stochastic model is established to investigate the influence of inherent heat elevation on vibrating nonlinearity, including linear natural frequency f(rn), nonlinear frequency offset F-off, resonator amplitude Amp, and the non-linear factor F-nol, considering uncertainty distributions of structure size and excitation voltage due to fabricating or control errors. The results reveal that the dc bias of the excitation signal has significant effect on vibrating nonlinearity, which is verified by experiments. The results can be used as reference for sensor design and operation with respect to proposed nonlinear effects.

• 出版日期2015-8-1
• 单位北京航空航天大学