Preparation of Naturally Textured Aluminum-Doped Zinc Oxide Films on Flexible Poly(ether sulfone) Substrate by Radio Frequency Magnetron Sputtering

作者：An Jae Seok^*; Shin Jin Koog; Lee Jong Ho; Choi Bum Ho

来源：Japanese Journal of Applied Physics, 2013, 52(3): 031101.

DOI：10.7567/JJAP.52.031101

Transparent conducting oxide (TCO) layers of naturally textured aluminum-doped zinc oxide (AZO) were prepared on flexible poly(ether sulfone) (PES) substrates by controlling the radio frequency (RF) magnetron sputtering power without chemical wet etching, and their morphological, optical, and electrical properties were characterized. Layers with crater structures were formed at a single RF power; whereas at high RF power (2000 W), their surfaces resembled that of chemically wet-etched AZO. Layers were also formed by dual RF sputtering powers: sputtering a 0.15-mu m-thick layer at high power and a subsequent 0.45-mu m-thick layer at low power produced flakes with larger grains or crater-like structures. The measured visible transmittance of all the layers was >85%-sufficient for use in amorphous silicon (a-Si) thin-film solar cells. The measured optical and electrical properties of the naturally textured AZO layers are comparable to those of chemically wet-etched AZO layers, suggesting a possible method for fabricating inexpensive flexible a-Si thin-film solar cells in fewer steps.

• 出版日期2013-3