摘要

The surface topographies of Si/TiN/Pd substrate and amorphous electroless Ni-13. 1wt% Cu-9.3wt% P alloy deposited in various time were measured with an atomic force microscope (AFM). Multifractal spectra f(alpha) show that the longer the deposition time, the wider the spectrum, and the larger the Deltaf(Deltaf = f(alpha(min)) - f(alpha(max))). It is apparent that the nonuniformity of the height distribution increases with increasing deposition time, and the nodules of Ni-Cu-P alloy grow in both horizontal and vertical directions. These results show that the AFM images can he characterized by the multifractal spectra.