Mechanical properties of porous silicon by depth-sensing nanoindentation techniques

作者：Fang Zhen qian^*; Hu Ming; Zhang Wei; Zhang Xu rui; Yang Hai bo

来源：Thin Solid Films, 2009, 517(9): 2930-2935.

DOI：10.1016/j.tsf.2008.12.027

• Hardness
• Young's modulus
• Nanoindentation
• Porous silicon
• Thermal oxidation
• Scanning electron microscopy

Porous silicon (PS) was prepared using the electrochemical corrosion method. Thermal oxidation of the asprepared PS samples was performed at different temperatures for tuning their mechanical properties. The mechanical properties of as-prepared and oxidized PS were thoroughly investigated by depth-sensing nanoindentation techniques with the continuous stiffness measurements option. The morphology of asprepared and oxidized PS was characterized by field emission scanning electron microscope and the effect of observed microstructure changes on the mechanical properties was discussed. It is shown that the hardness and Young's elastic modulus of as-prepared PS exhibit a strong dependence on the preparing conditions and decrease with increasing current density. in particular, the mechanical properties of oxidized PS are improved greatly compared with that of as-prepared ones and increase with increasing thermal oxidation temperature. The mechanism responsible for the mechanical property enhancement is possibly the formation of SiO(2) cladding layers encapsulating on the inner surface of the incompact sponge PS to decrease the porosity and strengthen the interconnected microstructure.

• 出版日期2009-3-2
• 单位天津大学