Dual-axes differential confocal microscopy with high axial resolution and long working distance

作者：Zhao Weiqian^*; Jiang Qin; Qiu Lirong; Liu Dali

来源：Optics Communications, 2011, 284(1): 15-19.

DOI：10.1016/j.optcom.2010.08.033

• Confocal microscopy
• Dual-axes differential confocal microscopy (DDCM)
• Thickness measurement
• Tracing measurement

We discover that the slight transverse offset of a point detector results in a shift of the axial intensity response curve in a dual-axes confocal microscopy (DCM). Based on this, we propose a new dual-axes differential confocal microscopy (DDCM) with high axial resolution and long working distance, in which two point detectors are placed symmetrically about the collection axis. And a signal is obtained through the differential subtraction of two signals received simultaneously by the two point detectors. Theoretical analyses and preliminary experiments indicate that DDCM is feasible and suitable for the high precision tracing measurement of microstructures and surface contours.

• 出版日期2011-1-1
• 单位北京理工大学