An optical fiber pressure sensor based on F-P interferometry and intensity demodulation

作者：Deng Yuan Long; Zhao Xiao Li; Li Xue Jin^*; Geng You Fu; Hong Xue Ming; Qiu Cheng Jun

来源：Journal of Shenzhen University Science and Engineering, 2011, 28(1): 17-22.

• Analysis and simulation
• Circular diaphragms
• Fabry-Perot
• High sensitivity
• Intensity demodulation
• Intensity variations
• Large area ratio
• Measurement range
• Micro-electro-mechanical systems (MEMS)
• Moving mirrors
• Multi sensor
• Non-Linearity
• Optical fiber coupler
• Optical fiber pressure sensors
• Planarity
• Pressure ranges
• Relative sensitivity
• Sensitive elements
• Sensor technology
• Single-value
• Square silicon diaphragm

An optical fiber pressure sensor was designed, fabricated and characterized. It employed a Fabry-Perot (F-P) interferometer and simple intensity-demodulation technology. A square silicon cup processed by anisotropic etching serves as sensitive element for the better consistency than that of circular diaphragm. A large area ratio of the moving mirror to the stationary one is introduced to reduce the nonlinearity due to the non-planarity of the deflection. Reference light generated from a 2×2 optical fiber coupler is used to decrease the influence of intensity variations of the light source. Single-value measurement was achieved under the pressure range from 0 to 38 kPa. The experimental results demonstrate an upmost relative sensitivity of 0.7%/kPa and a reasonable repeatability, consisting well with the theoretical analysis and simulation. A new method of multi-wave or multi-sensor is presented to expand the measurement range with high sensitivity.

• 出版日期2011