Comparative Surface Study on Hydrogen Terminated Si Surface Covered with Alcohols

作者：Sato Nobuyoshi^*; Shimogaki Yukihiro

来源：ECS Journal of Solid State Science and Technology, 2014, 3(3): N46-N51.

DOI：10.1149/2.011403jss

We investigated the relative coverage of an alcohol adsorbed on a hydrogen terminated Si (H-terminated Si) surface by angle resolved X-ray photoelectron spectroscopy (ARXPS). We found that both Si-2p (103.3 eV; (Si) double under bar -O) and O-1s (532.5 eV; Si-(O) double under bar) spectra increased in the order of IPA < ethanol < methanol through all takeoff angles, and both spectra increased as the takeoff angle decreased in these alcohol treatments. The H-terminated Si surface was oxidized by coating these alcohols. In addition, the C-1s (284.6 eV; (C) under bar -H or (C) under bar -C/H) spectrum slightly increased in order of IPA < ethanol < methanol through all takeoff angles, and increased as the takeoff angle decreased. The relative coverage of alcohols adsorbed on the H-terminated Si and their water contact angles are discussed in greater detail.

• 出版日期2014