Deposition of DLC/oxynitriding Films onto JIS SKD11 Steel by Bipolar-pulsed PECVD

作者：Chang Shih Hsien^*; Yu Chun Cheng; Huang Kuo Tsung; Liu Chung Ming

来源：ISIJ International, 2015, 55(12): 2631-2638.

DOI：10.2355/isijinternational.ISIJINT-2015-350

• DLC
• bipolar-pulsed PECVD
• oxynitriding
• SKD11
• wear
• corrosion resistance

In this study, diamond-like carbon (DLC) films are coated by bipolar-pulsed PECVD onto oxynitriding-treated JIS SKD11 steel. In order to evaluate the properties of the DLC/oxynitriding films on SKD11 steel, Raman spectroscopy analysis, wear tests, adhesion tests, hardness tests and corrosion resistance inspections are performed. The experimental results show that the DLC/oxynitride duplex layers possess ideal wear and corrosion resistance when DLC films are deposited by unbalanced bipolar-pulsed voltage, with a coating time of 90 min and duty cycles maintained at 15%. The highest surface hardness (Hv(0.025) 2 830.7) and lowest wear volume loss (when the load of 2 N and sliding speed of 0.05 m.s(-1) is 4.07 x 10(-3) mm(3) and the load of 5 N and sliding speed of 0.25 m.s(-1) is 5.83 x 10(-3) mm(3), respectively) are obtained. In addition, the optimal DLC/oxynitride films also possess the lowest corrosion current (I-corr = 2.66 x 10(-6) A.cm(-2)) and highest polarization resistance (R-p = 1.57 x 10(4) Omega.cm(2)) in 3.5 wt% NaCl solutions.

• 出版日期2015