Application of the Kriging method to the reconstruction of ellipsometric signature

作者：Afraites L^*; Hazart J; Schiavone P

来源：Microelectronic Engineering, 2009, 86(4-6): 1033-1035.

DOI：10.1016/j.mee.2009.01.049

• Surface patterning
• Scatterometry
• Ellipsometry
• Inverse problem
• Kriging
• Semivariogram

The inverse problem in scatterometry which consists in determining the feature shape from an experimental ellipsometric signature is very difficult to solve. on one hand, the problem is ill-posed; on the other hand, due to equipment limitation and the presence of noise in the measurement, the number of experimental signature acquisition is limited to a few measurements. The efficient resolution of the inverse problem requires a more comprehensive signature. To deal with this problem, we use a new approach based on the Kriging interpolation method to enrich the number of usable data. This method is inherently providing the best linear unbiased optimal estimation.

• 出版日期2009-6
• 单位中国地震局