A Three-Dimensional Simulation Study of Source/Drain-Tied Double-Gate Fin Field-Effect Transistor Design for 16-nm Half-Pitch Technology Generation and Beyond

作者：Eng, Yi Chuen^*; Lin, Jyi Tsong; Chang, Tzu Feng; Chen, Chun Yu; Fan, Yi Hsuan; Chen, Cheng Hsin; Lin, Po Hsieh

来源：Japanese Journal of Applied Physics, 2011, 50(8): 084301.

DOI：10.1143/JJAP.50.084301

This paper presents a three-dimensional (3D) simulation study of source/drain (S/D)-tied (SDT) double-gate (DG) fin field-effect transistor (FinFET) design for 16-nm half-pitch technology generation and beyond using technology computer-aided design (TCAD) tools. A simple process to fabricate the proposed SDT FinFET is proposed. An investigation of the fin width (W-fin) on the electrical characteristics is shown, suggesting that a reduced W-fin is good for both the suppression of short-channel effects and the reduction of parasitic capacitance in SDT FinFETs. Also, the self-heating can be well controlled in our proposed SDT FinFET which is a difficult task for SOI family. The proposed FinFET is also compared with the existing experimental data, showing that the SDT FinFET not only demonstrates desired short-channel characteristics due to its inherent structure advantages (partially insulating oxide under the channel region), but also reduces the costs of device fabrication due to its simple process method and planar-like structure.

• 出版日期2011-8
• 单位中山大学