Design and characterization of millimeter-wave micromachined polymer-based cavity filter with resonant cylinders

作者:Xiao, Hong; Duan, Junping*; Zhang, Binzhen; Zhang, Anxue; Huang, Chengyuan; Jia, Qinyin
来源:Sensors and Actuators A: Physical , 2018, 284: 242-250.
DOI:10.1016/j.sna.2018.10.032

摘要

This paper presents a Ka-b and cavity bandpass filter using SU-8 polymer UV lithography technology. The filter has a folded structure with six cavity resonators having resonant cylinders, enabling compact design and improved stopband characteristics. The fabrication of the millimeter-wave filter with a complicated multi-height and high aspect-ratio structure is realized using the proposed methods. A coaxial-rectangular waveguide transition is designed for the measurement process. The measured results of the filter are in good agreement with the simulated ones, with a center; frequency of 38 GHz, insertion loss of 0.7 dB, and fractional bandwidth of 4.4%. The stopband rejection reaches 70 dB at 35.5 and 40.5 GHz. The experimental results are discussed and force and thermal stress analysis is conducted to confirm the feasibility of the design and fabrication methods of the cavity filter.