Modeling and analysis of MEMS disk resonators

作者：Chorsi Meysam T.^*; Chorsi Hamid T.

来源：Microsystem Technologies, 2018, 24(6): 2517-2528.

DOI：10.1007/s00542-017-3645-9

In this work a very accurate process for modeling a microdisk resonator is presented and the dynamic behavior of the resonator is investigated. Using the minimization of the Hamiltonian, the governing equation of the motion is derived. The periodic solutions in the vicinity of primary resonance are determined by means of shooting method and their stability is investigated by determining the so-called Floquet exponents of the perturbed motions. To obtain a very accurate model, the influences of intermolecular forces such as van der Waals and Casimir is included in the modeling process. The effect of the design parameters on the dynamic responses is discussed. The results indicate that, high quality factor in the ultra-high frequency (UHF), weak nonlinearity, low actuation voltage and very high pull-in voltage, make these polydiamond disk resonators the most likely leaders in the next-generation micromechanical RF filters and channelizers.

• 出版日期2018-6