Deposition of tungsten oxynitride nanowires through simple evaporation and subsequent annealing

作者:Jeon Seongho; Kim Hyeyoung; Yong Kijung*
来源:JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2009, 27(2): 671-676.
DOI:10.1116/1.3100267

摘要

A high density of tungsten oxynitride nanowires was synthesized by ammonia annealing of WO(3) nanowires, which were grown on a tungsten substrate by thermal evaporation of WO(3) powder. The morphology of WO(3) nanowires was not changed upon ammonia annealing at 650 C, although the color of the sample changed drastically. X-ray diffraction and transmission electron microscopy analyses showed that the structure of the ammonia annealed nanowires matched well, with a cubic oxynitride, with the structure of W(0.62)(N(0.62)O(0.38)). The x-ray photoelectron spectroscopy and x-ray spectroscopy also confirmed the formation of the tungsten oxynitride nanowires. Field emission measurements showed a low turn-on field of 4.45 V/mu m for the WN(x)O(y) nanowires, indicating that they can be used as potential field emitters.

  • 出版日期2009-4