Anisotropy of heat conduction in Mo/Si multilayers

作者：Medvedev V V^*; Yang J; Schmidt A J; Yakshin A E; van de Kruijs R W E; Zoethout E; Bijkerk F

来源：Journal of Applied Physics, 2015, 118(8): 085101.

DOI：10.1063/1.4928958

This paper reports on the studies of anisotropic heat conduction phenomena in Mo/Si multilayers with individual layer thicknesses selected to be smaller than the mean free path of heat carriers. We applied the frequency-domain thermoreflectance technique to characterize the thermal conductivity tensor. While the mechanisms of the cross-plane heat conduction were studied in detail previously, here we focus on the in-plane heat conduction. To analyze the relative contribution of electron transport to the in-plane heat conduction, we applied sheet-resistance measurements. Results of Mo/Si multilayers with variable thickness of the Mo layers indicate that the net in-plane thermal conductivity depends on the microstructure of the Mo layers.

• 出版日期2015-8-28