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摘要
Spatial distributions of plasma parameters such as electron density, electron temperature and electric potential were investigated using a commercial simulation software (COMSOL (TM)) to predict the effects of antenna configuration in a large area inductively coupled plasma (ICP) system for flat panel displays. Nine planar antenna sets were evenly placed above a ceramic While the electron density was influenced by both the input current and gas pressure, the electron temperature and electric potential were dominantly affected by the gas pressure.
- 出版日期2014-8
