科研之友
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摘要
A method based on admittance diagram called Admittance Realtime Monitoring, ARM, was proposed to monitor multilayer coatings. This optical monitoring method is highly sensitive and capable to compensate for thickness errors. The sensitivities of ARM were compared with that of the conventional method by using runsheet diagram. The in situ error compensation of ARM showed a great improvement in the optical performance when utilized in an anti-reflection coating process.
- 出版日期2008-4-28
- 单位中央民族大学
