A 0.3-mW/Ch 1.25 V Piezo-Resistance Digital ROIC for Liquid-Dispensing MEMS

作者：Dura Roger^*; Mathieu Fabrice; Nicu Liviu; Perez Murano Francesc; Serra Graells Francisco

来源：IEEE Transactions on Circuits and Systems I-Regular Papers, 2009, 56(5): 957-965.

DOI：10.1109/TCSI.2009.2015210

• Analog-to-digital (A/D) conversion
• CMOS interface circuits
• micro-electro-mechanical systems (MEMS)
• piezo-resistive sensors
• pulse density modulation (PDM)

A low-power multichannel CMOS digital read-out IC (ROIC) for differential piezo-resistive sensing is presented as part of the positioning system of a liquid dispensing MEMS. New very low-voltage and single-battery compatible CMOS circuits are proposed for digital gain tuning, pre-amplification, and integrating AID conversion. Overall low-power consumption is achieved by operating the key devices in subthreshold in order to prevent from heating the fluidic MEMS. A complete quad-channel ROIC has been integrated in 0.35-mu m CMOS 2-polySi 4-metal technology. The reported experimental results agree with the electrical simulations.

• 出版日期2009-5