Deposition of MoSx self-lubricating coatings by cathodic arc plating with ion source [离子源辅助电弧离子镀制备MoSx自润滑涂层]

作者：Li Z.^*; Liu Y.; Tian C.; Yang B.; Fu D.; Su F.

来源：Materials Science and Engineering of Powder Metallurgy, 2018, 23(2): 186-191.

• Arc ion plating
• Hollow cathode arc ion source
• Mechanical property
• MoSx coatings
• Self-lubricating coatings

MoSx self-lubricating coatings was deposited on crystal Si and cemented carbide substrates using Ar, H2S and metal molybdenum as S and Mo source by arc ion plating, by hollow cathode arc ion source. The effects of H2S flow rate on microstructure and mechanical properties of the coatings were systemically investigated. The results show that the H2S flow rate has a significant effect on crystalline structure, micro-hardness and friction coefficient of MoSx coating. With the increase of H2S flow rate, the grain size of Mo decreases while the content of MoSx increases in the coatings. The microhardness and average friction coefficients decrease with increasing the H2S flow rate. The average friction coefficients are lower than 0.35 (mating cemented carbide). The H2S can be used for MoSx self-lubricating coating deposition. The structure of MoSx coatings deposited by arc ion plating is Mo nanocrystalline embedded in MoS, MoS2 amorphous phase matrix. ? 2018, Editorial Office of Materials Science and Engineering of Powder Metallurgy. All right reserved.

• 出版日期2018
• 单位华南理工大学