A domain decomposition approach for the simulation of fracture phenomena in polycrystalline microsystems

作者：Confalonieri Federica; Ghisi Aldo; Cocchetti Giuseppe; Corigliano Alberto^*

来源：Computer Methods in Applied Mechanics and Engineering, 2014, 277: 180-218.

DOI：10.1016/j.cma.2014.04.007

• Quasi-brittle fracture
• Polysilicon
• Cohesive crack
• MEMS
• Domain decomposition

In this work, a domain decomposition technique is proposed to reduce the computational burden of three-dimensional numerical analyses of fracture processes in polycrystalline solids under dynamic loads. The material considered is polysilicon, which is the most widely employed structural material for Micro-Electro-Mechanical Systems (MEMS).
The algorithm extends the proposal of Gravouil and Combescure (2001) to fracture processes involving the presence of discrete cracks propagating both inside the sub-domains and across the interfaces between neighbouring sub-domains. The case of brittle or quasi-brittle fracture is addressed by means of a cohesive approach. Alternative choices for the spatial subdivision strategy are compared. Numerical examples concerning known fracture tests are used for validation. Two applications to real MEMS are presented.

• 出版日期2014-8-1