摘要
A low-cost nano-gap interdigitated electrode array (IDA) on a polymer substrate has been developed to realize a disposable nano-biosensor for biochemical clinical analysis. Utilizing the common instruments for optical lithography, nano-scale features were fabricated on a thermoplastic polymer to produce an electrochemical nano-biosensor in a disposable format. The IDA was realized on a 3-inch cyclo-olefin copolymer wafer, which illustrates the utility of our fabrication technique as a large-area nanofabrication process for a polymer using low temperature processes. In order to demonstrate the use of the sensor for lab-on-a-chip applications, the developed IDA was integrated with a microfluidic channel and applied for the electrochemical detection of poly-aminophenol with 10(-8) M detection limit. The results indicate the developed fabrication technique is suitable for the inexpensive mass fabrication of highly sensitive nano-biosensors for disposable applications.
- 出版日期2013-3