摘要

Piezoelectric actuators used in vibration control and high precision control have been widely used in recent years. In aeronautics and MEMS systems especially, their applications are spread from vibration suppression to position control. In this paper, a finite element model (FEM) of a piezoelectric actuator and cantilever in a thermal environment is presented to suppress vibration effectively. In other words, the FEM is namely a thermal-electrical-mechanical coupled FEM. Based on an eight-node plane finite element, the harmonic analysis and the free vibration analysis have been obtained in the current work. Therefore a transfer function model will be attained through the harmonic analysis by an identification method. In addition, a controller is designed with the adaptive pole placement control (APPC). Finally, through simulation, the thermal influence is considerable for natural frequencies, harmonic response and free vibration. Moreover, the APPC is a significant plan to vibration control in the paper.