A magnetic electron energy analyser for fast data acquisition

作者：Zha X; Walker C G H; El Gomati M M^*

来源：Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment , 2011, 645(1): 257-259.

DOI：10.1016/j.nima.2010.12.139

• Auger electron spectroscopy
• Scanning electron microscopy
• Electron energy analyser
• Magnetic spectrometer
• Active Pixel Sensor

A new approach to the acquisition of Auger electron spectra is introduced. Electrons emitted from a sample illuminated by a primary electron beam are dispersed by a magnetic field which immerses both sample and electron energy analyser. The analyser is broadly based on the 180 degrees magnetic spectrometer, but can acquire spectra with good energy resolution for electrons with a significant component of velocity parallel to the magnetic field. An Active Pixel Sensor is used to acquire the electron spectrum without the use of a microchannel plate as in most currently used analysers. An example spectrum of an elastic peak is given.

• 出版日期2011-7-21