Ultrahigh Frequency Micromachined Ultrasound Transducers Based on Piezoelectric Single Crystalline Wafers

作者：Peng, Xiaojian; Peng, Jue^*; Tang, Hu; Wang, Tianfu; Chen, Siping

来源：Journal of Medical Imaging and Health Informatics, 2015, 5(2): 374-377.

DOI：10.1166/jmihi.2015.1402

• Ultrahigh Frequency
• Micromachined
• Transducer
• Ultrasound

In this paper, piezoelectric single crystalline PMNT layer with thickness ranging from several microns to several tens microns has been demonstrated on PMMA substrate for miniature ultrasound probes applications. By micromachining of the PMNT-on-substrate wafers, 2 mm diameter aperture ultrasonic transducer is fabricated. The ultrasonic pulse-echo characteristics of the transducer were measured and the results show that the non-matching layer single element transducer with 6 Mrayl backing layer has a center frequency of 45 MHz and a -6dB bandwidth of 25%. Experimental results are in good agreement with those predicted by the KLM model. This novel processing of PMNT-on-substrate micromachining can be applied to various MEMS applications such as acoustic sensor, ultrasonic transducer, resonator, pressure sensor, etc.

• 出版日期2015-4
• 单位深圳大学