A method for manufacturing a probe for a combined scanning tunneling and atomic-force microscope on the basis of a quartz tuning fork with a supersharp metal tip

作者：Dremov V V^*; Jum' h I Y; Maharramov H A; Mueller P H

来源：Instruments and Experimental Techniques, 2013, 56(5): 584-588.

DOI：10.1134/S0020441213040167

A method for manufacturing a probe for a combined scanning tunneling and atomic-force microscope on the basis of a quartz tuning fork with a metal tip, which is equipped with an independent conductor, is described. When the probe is manufactured, the billet for a tip has the form of a rather small (in order not to change the frequency and quality factor of the quartz tuning fork) metal cone, which is glued to the end of the beam of the quartz resonator-tuning fork together with a carbon fiber as a conductor. A spark is used to form a melted ball at the vertex of the cone. The thickness of the cone near the ball is reduced to a diameter of %26lt; 0.5 mu m by the electrochemical technique, and the ball is then mechanically detached. The main advantage of this method is that it allows manufacturing a high-quality-factor force detector with a single super sharp and clean tip, which is made of platinum (or platinum alloys) and tungsten, with a yield of a parts per thousand yen80%.

• 出版日期2013-9