Development of a flexible three-axial tactile sensor array for a robotic finger

作者：Kwon Hyun Joon; Kim Jong Ho; Choi Woo Chang^*

来源：Microsystem Technologies, 2011, 17(12): 1721-1726.

DOI：10.1007/s00542-011-1368-x

In this paper, we propose a flexible three-axial tactile sensor array for measuring both normal and shear loads. The sensor array has 16 tactile sensor units based on piezoresistive strain gauge. It is constructed on a Kapton polyimide film using advanced polymer micromachining technologies. Thin metal strain gauges are embedded in polyimide to measure normal and shear loads, which are tested by applying forces from 0 to 1 N. The developed sensor unit had a hysteresis error of about 9% and repeatability error of about 1.31%. The sensor showed a good resulting image when pressed by a circle-shaped object with 10 N loads. The proposed flexible three-axial tactile sensor array can be applied in a curved or compliant surface that requires slip detection and flexibility, such as a robotic finger.

• 出版日期2011-12