Atomic force microscopy nanolithography: fabrication of metallic nano-slits using silicon nitride tips

作者:Koenig Tobias; Papke Thomas; Kopyshev Alexey; Santer Svetlana*
来源:Journal of Materials Science, 2013, 48(10): 3863-3869.
DOI:10.1007/s10853-013-7188-x

摘要

In this paper, we report on the properties of nano-slits created in metal thin films using atomic force microscope (AFM) nanolithography (AFM-NL). We demonstrate that instead of expensive diamond AFM tips, it is also possible to use low cost silicon nitride tips. It is shown that depending on the direction of scratching, nano-slits of different widths and depths can be fabricated at constant load force. We elucidate the reasons for this behavior and identify an optimal direction and load force for scratching a gold layer.

  • 出版日期2013-5