3D whispering-gallery-mode microlasers by direct laser writing and subsequent soft nanoimprint lithography

作者：Brenner Philipp^*; Bar On Ofer; Siegle Tobias; Leonhard Tobias; Gvishi Raz; Eschenbaum Carsten; Kalt Heinz; Scheuer Jacob; Lemmer Uli

来源：Applied Optics, 2017, 56(13): 3703-3708.

DOI：10.1364/AO.56.003703

We demonstrate the realization of 3D whispering-gallery-mode (WGM) microlasers by direct laser writing (DLW) and their replication by nanoimprint lithography using a soft mold technique ("soft NIL"). The combination of DLW as a method for rapid prototyping and soft NIL offers a fast track towards large scale fabrication of 3D passive and active optical components applicable to a wide variety of materials. A performance analysis shows that surface-scattering-limited Q-factors of replicated resonators as high as 1 x 10(5) at 635 nm can be achieved with this process combination. Lasing in the replicated WGM resonators is demonstrated by the incorporation of laser dyes in the target material. Low lasing thresholds in the order of 15 kW/cm(2) are obtained under ns-pulsed excitation.

• 出版日期2017-5-1