Design and Fabrication of Single-Walled Carbon Nanonet Flexible Strain Sensors

作者：Huang Ya Ting; Huang Shyh Chour^*; Hsu Chih Chao; Chao Ru Min; Trung Kien Vu

来源：Sensors, 2012, 12(3): 3269-3280.

DOI：10.3390/s120303269

• Parylene-C
• single-walled carbon nanonets
• strain sensor

This study presents a novel flexible strain sensor for real-time strain sensing. The material for strain sensing is single-walled carbon nanonets, grown using the alcohol catalytic chemical vapor deposition method, that were encapsulated between two layers of Parylene-C, with a polyimide layer as the sensing surface. All of the micro-fabrication was compatible with the standard IC process. Experimental results indicated that the gauge factor of the proposed strain sensor was larger than 4.5, approximately 2.0 times greater than those of commercial gauges. The results also demonstrated that the gauge factor is small when the growth time of SWCNNs is lengthier, and the gauge factor is large when the line width of the serpentine pattern of SWCNNs is small.

• 出版日期2012-3