摘要
The effects of micromachining bulk rare-earth magnets are investigated by measurements of the moment of sub-millimeter scale micromachined structures. A model representing these effects is also presented to provide a basis for interpreting the results. Laser-induced damage to the magnetic material, manifesting as a loss of magnetic properties, is estimated to reach 10-20 mu m from the magnet edge in the lateral dimension. The results indicate the affected volume due to laser micromachining bulk rare-earth magnets is limited to less than 25 mu m, laterally through the material, for the rare-earth magnetic materials tested.
- 出版日期2012-11