Microstructures and Recording Mechanism of Mo/Si Bilayer Applied for Write-Once Blue Laser Optical Recording

作者：Ou Sin Liang^*; Kao Kuo Sheng; Chang Han Feng; Ko Tsung Shine; Yeh Chin Yen

来源：Journal of Nanomaterials, 2014, 2014: 862928.

DOI：10.1155/2014/862928

Mo/Si bilayer thin films were grown by magnetron sputtering and applied to write-once blu-ray disc (BD-R). The microstructures and optical storage properties of Mo/Si bilayer were investigated. From the temperature dependence of reflectivity measurement, it was revealed that a phase change occurred in the range of 255-425 degrees C. Transmission electron microscopy analysis showed that the as-deposited film possessed Mo polycrystalline phase. The hexagonal MoSi2 and cubic Mo 3 Si phases appeared after annealing at 300 and 450 degrees C, respectively. By measuring the optical reflectivity at a wavelength of 405 nm, the optical contrast of Mo/Si bilayer between as-deposited and 450 degrees C-annealed states was evaluated to 25.8%. The optimum jitter value of 6.8% was obtained at 10.65 mW for 4x recording speed. The dynamic tests show that the Mo/Si bilayer has high potential in BD-R applications.

• 出版日期2014