Field plate structural optimization for enhancing the power gain of GaN-based HEMTs

作者:Zhang Kai; Cao Meng-Yi; Lei Xiao-Yi; Zhao Sheng-Lei; Yang Li-Yuan; Zheng Xue-Feng; Ma Xiao-Hua*; Hao Yue
来源:Chinese Physics B, 2013, 22(9): 097303.
DOI:10.1088/1674-1056/22/9/097303

摘要

A novel source-connected field plate structure, featuring the same photolithography mask as the gate electrode, is proposed as an improvement over the conventional field plate (FP) techniques to enhance the frequency performance in GaN-based HEMTs. The influences of the field plate on frequency and breakdown performance are investigated simultaneously by using a two-dimensional physics-based simulation. Compared with the conventional T-gate structures with a field plate length of 1.2 mu m, this field plate structure can induce the small signal power gain at 10 GHz to increase by 5-9.5 dB, which depends on the distance between source FP and dramatically shortened gate FP. This technique minimizes the parasitic capacitances, especially the gate-to-drain capacitance, showing a substantial potential for millimeter-wave, high power applications.

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