Stability analysis of a parametrically excited functionally graded piezoelectric, MEM system

作者：Azizi Saber; Ghazavi Mohammad Reza; Khadem Siamak Esmaeilzadeh; Yang Jie; Rezazadeh Ghader^*

来源：Current Applied Physics, 2012, 12(2): 456-466.

DOI：10.1016/j.cap.2011.08.001

• FGP clamped-clamped micro-beam
• Parametric excitation
• Stability analysis
• Mathieu equation
• MEMS
• Perturbation technique

In this paper the mechanical behavior of a parametrically actuated functionally graded piezoelectric (FGP) clampedeclamped micro-beam is investigated. The micro-beam is supposed to be a composite material with silicon and piezoelectric base. The mechanical properties of the structure, including elasticity modulus, density, and piezoelectricity coefficient are supposed to vary along the height of the micro-beam with an exponential functionality. It is supposed that the FGP clampedeclamped micro-beam is actuated with a combination of direct and alternative electric potential difference. Application of DC and AC actuation voltage leads in a constant and a time-varying axial force. The governing differential equation of the motion is derived using Hamiltonian principle and discretized using expansion theorem with the corresponding shape functions of a clamped-clamped beam. The discretized system is governed by Mathieu equation which%26apos;s stability is investigated using Floquet theory for single degree of freedom systems and verified using multiple time scales of perturbation technique.

• 出版日期2012-3