A review of roll-to-roll nanoimprint lithography

作者：Kooy Nazrin; Mohamed Khairudin^*; Pin Lee Tze; Guan Ooi Su

来源：Nanoscale Research Letters, 2014, 9(1): 320.

DOI：10.1186/1556-276X-9-320

• Nanoimprint
• Lithography
• Nanofabrication
• Nanopatterning
• Roll-to-roll
• Roll-to-plate
• Plate-to-plate

Since its introduction in 1995, nanoimprint lithography has been demonstrated in many researches as a simple, low-cost, and high-throughput process for replicating micro and nanoscale patterns. Due to its advantages, the nanoimprint lithography method has been rapidly developed over the years as a promising alternative to conventional nanolithography processes to fulfill the demands generated from the recent developments in the semiconductor and flexible electronics industries, which results in variations of the process. Roll-to-roll (R2R) nanoimprint lithography (NIL) is the most demanded technique due to its high-throughput fulfilling industrial-scale application. In the present work, a general literature review on the various types of nanoimprint lithography processes especially R2R NIL and the methods commonly adapted to fabricate imprint molds are presented to provide a clear view and understanding on the nanoimprint lithography technique as well as its recent developments.

• 出版日期2014-6-25