Generation of Ensembles of Individually Resolvable Nitrogen Vacancies Using Nanometer-Scale Apertures in Ultrahigh-Aspect Ratio Planar Implantation Masks

作者：Bayn Igal; Chen Edward H; Trusheim Matthew E; Li Luozhou; Schroeder Tim; Gaathon Ophir; Lu Ming; Stein Aaron; Liu Mingzhao; Kisslinger Kim; Clevenson Hannah; Englund Dirk^*

来源：Nano Letters, 2015, 15(3): 1751-1758.

DOI：10.1021/nl504441m

• implantation mask
• nanoaperture
• diamond color centers
• nitrogen vacancy
• spin chain
• quantum computing

A central challenge in developing magnetically coupled quantum registers in diamond is the fabrication of nitrogen vacancy (NV) centers with localization below similar to 20 nrn to enable fast dipolar interaction compared to the NV decoherence rate. Here, we demonstrate the targeted, high throughput formation of NV centers using masks with b. thickness of 270 nm and feature sizes down to similar to 1 run. Superresolution imaging resolves NVs with a full-width maximum distribution of 26 +/- 7 nm and a distribution of NV-NV separations of 16 +/- 5 nm.

• 出版日期2015-3