Mechanical response of polar/non-polar ZnO under low dimensional stress

作者：Sung, T H; Huang, J C^*; Chen, H C

来源：Applied Physics Letters, 2013, 102(24): 241901.

DOI：10.1063/1.4811554

The mechanical properties of high quality polar (c-plane) and non-polar (a-plane and m-plane) ZnO wafers were examined by using nanoindentation and microcompression testing. The nano-scaled modulus, hardness, and yield strength readings of the c-plane, a-plane and m-plane ZnO wafers determined by nanoindentation are 140, 159, and 161; 7.1, 3.9, and 4.0; and 12.0, 6.7, and 4.5GPa, respectively. The micro-scaled data directly measured by microcompression are much lower than the nano-scaled data. The cathodoluminescence images are in consistence with the slip systems observed from the transmission electron microscopy characterization.

• 出版日期2013-6-17
• 单位中山大学