A micromirror with large static rotation and vertical actuation

作者：Chiou Jin Chern^*; Kou Chin Fu; Lin Yung Jiun

来源：IEEE Journal of Selected Topics in Quantum Electronics, 2007, 13(2): 297-303.

DOI：10.1109/JSTQE.2007.892069

• microelectromechanical systems (MEMS)
• micromirror
• microoptoelectromechanical systems (MOEMS)
• prestress comb drive actuator (PCA)

A micromirror with large rotation angle and vertical displacement is proposed and developed. The proposed micromirror is actuated by newly developed prestress comb drive actuators, which exhibit no pull-in, no hysteresis, and large vertical displacement range characteristics. The micromirror was fabricated using commercially available PolyMUMPs. Experimental results indicated that the maximum rotation angle and vertical displacement of the device are 26 and 45 mu m, respectively.

• 出版日期2007-4